Highly porous silicon membrane fabrication using polymer self-assembly
- C.T. Black
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- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Publications
14466 results for Physical Sciences
Super-self-aligned back-gatedouble-gate planar transistors: Novel fabrication approach
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- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperApplication of three-parameter lognormal distribution in EM data analysis
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- K.W. Schwarz
- H. Mughrabi
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- Philosophical Magazine Letters
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- G. Srajer
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ReviewMastering double exposure process window aware OPC by means of virtual targets
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- SPIE Photomask Technology 2006
Conference paperVDD scaling for FinFET logic and memory circuits: The impact of process variations and SRAM stability
- C.-H. Lin
- K. Das
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- VLSI-TSA 2006
Conference paper