Thin film deposition with physical vapor deposition and related technologies
- S.M. Rossnagel
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
14467 results for Physical Sciences
Nanofabrication
- Christie R.K. Marrian
- Donald M. Tennant
- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
ReviewFerromagnetism of FePt3 films induced by ion-beam irradiation
- S. Maat
- A.J. Kellock
- et al.
- 2003
- Journal of Magnetism and Magnetic Materials
PaperBlock copolymer surface reconstruction: A reversible route to nanoporous films
- Ting Xu
- Jodi Stevens
- et al.
- 2003
- Advanced Functional Materials
PaperAbrupt Phosphorus Profiles in Si: Effects of Temperature and Substitutional Carbon on Phosphorus Autodoping
- D. Singh
- J.L. Hoyt
- et al.
- 2003
- JES
PaperUltrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applications
- E. Gusev
- C. Cabral Jr.
- et al.
- 2003
- Microelectronic Engineering
Conference paperInfluence and model of gate oxide breakdown on CMOS inverters
- R. Rodríguez
- J.H. Stathis
- et al.
- 2003
- Microelectronics Reliability
Conference paperFMR studies of CrO2 epitaxial thin films
- B.Z. Rameev
- R. Yilgin
- et al.
- 2003
- Microelectronic Engineering
Conference paperLatchup Analysis Using Emission Microscopy
- Franco Stellari
- Peilin Song
- et al.
- 2003
- Microelectronics Reliability
Conference paperReliability of ultra-thin oxides in CMOS circuits
- J.H. Stathis
- B.P. Linder
- et al.
- 2003
- Microelectronics Reliability
Conference paper