PREVAIL-EPL alpha tool: Early results
- S.D. Golladay
- H.C. Pfeiffer
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
14466 results for Physical Sciences
Frequency-dependent losses on high-performance interconnections
- Alina Deutsch
- Gerard V. Kopcsay
- et al.
- 2001
- IEEE Trans Electromagn Compat
PaperContactless testing of wiring networks by an electron beam system utilizing induced current detection
- S.D. Golladay
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperParasitic modes on printed circuit boards and their effects on EMC and signal integrity
- Christian Schuster
- Wolfgang Fichtner
- 2001
- IEEE Trans Electromagn Compat
PaperSubstrate dependence of magnetic properties of La0.67Ca0.33MnO3 films
- G. Campillo
- A. Berger
- et al.
- 2001
- Journal of Magnetism and Magnetic Materials
PaperThin film confinement effects on the thermal properties of model photoresist polymers
- Christopher L. Soles
- Eric K. Lin
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperDynamical study of remanent magnetization in nanoparticles
- G. Grinstein
- G.A. Held
- et al.
- 2001
- Journal of Magnetism and Magnetic Materials
PaperNear-complete spin polarization in atomically-smooth chromium-dioxide epitaxial films prepared using a CVD liquid precursor
- A. Anguelouch
- A. Gupta
- et al.
- 2001
- Physical Review B - CMMP
PaperThermomechanical distortions of the PREVAIL mask system during exposure
- P.-T. Lee
- C. Martin
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperConfinement effects on the spatial extent of the reaction front in ultrathin chemically amplified photoresists
- Darío L. Goldfarb
- Marie Angelopoulos
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper