Predicting in-plane distortion from electron-beam lithography on x-ray mask membranes
- D.L. Laird
- R. Engelstad
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Publications
14462 results for Physical Sciences
Electromigration drift velocity in Al-alloy and Cu-alloy lines
- C.-K. Hu
- K.Y. Lee
- et al.
- 1996
- JES
PaperScaling silicon MOS devices to their limits
- S.J. Wind
- D.J. Frank
- et al.
- 1996
- Microelectronic Engineering
PaperHigh resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- D.M. Tanenbaum
- C.W. Lo
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperRole of gas phase reactions in subatmospheric chemical-vapor deposition ozone/TEOS processes for oxide deposition
- I.A. Shareef
- G.W. Rubloff
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperEnergy spread in liquid metal ion sources at low currents
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperStudies of mass-movement processes on submarine slopes
- Lincoln F. Pratson
- Homa J. Lee
- et al.
- 1996
- Oceanography
PaperOptical characterization of surfaces during epitaxial growth using RDS and GIXS
- I. Kamiya
- L. Mantese
- et al.
- 1996
- Journal of Crystal Growth
PaperMass sensitive detection of carbon dioxide by amino group-functionalized polymers
- Rongnong Zhou
- Dieter Schmeisser
- et al.
- 1996
- Sensors and Actuators, B: Chemical
PaperOrigin of the φ ∼ ±9° peaks in YBa2Cu3O7-δ films grown on cubic zirconia substrates
- D.G. Schlom
- E.S. Hellman
- et al.
- 1996
- Journal of Materials Research
Paper