Titanium Dioxide Films to Improve Photoresist Adhesion
- John C. Marinace
- Ralph C. McGibbon
- 2019
- JES
Paper
Publications
509 results at JES
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- V.J. Silvestri
- V.L. Rideout
- et al.
- 2019
- JES
PaperSilicon Oxidation Studies: Some Aspects of the Initial Oxidation Regime
- E.A. Irene
- 2019
- JES
PaperThe Defect Structure of ZnSe:Ga
- A. Ray
- F.A. Kröger
- 2019
- JES
PaperThe Formation of SiO2 in an RF Generated Oxygen Plasma: I. The Pressure Range Below 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
PaperEffects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- Israel Lerner
- Jerome M. Eldridge
- 2019
- JES
PaperSelf-Diffusion and Na-K Exchange in βand β”-Na-Gallate Fast Ion Conductors
- L.M. Foster
- D.R. Campbell
- et al.
- 2019
- JES
PaperPre- and Postepitaxial Gettering of Oxidation and Epitaxial Stacking Faults in Silicon
- M.C. Chen
- V.J. Silvestri
- et al.
- 2019
- JES
PaperFabrication Processes for a Silicon Substrate Package for Integrated Gallium Arsenide Laser Arrays
- Michael J. Brady
- 2019
- JES
PaperSilicon Oxidation Studies: The Oxidation of Heavily B- and P-Doped Single Crystal Silicon
- E.A. Irene
- D.W. Dong
- 2019
- JES
Paper