A DUAL DAMASCENE HARD METAL CAPPED CU AND AL-ALLOY FOR INTERCONNECT WIRING OF ULSI CIRCUITS
- H. Dalai
- R.V. Joshi
- et al.
- 1993
- IEDM 1993
Conference paper
Publications
14466 results for Physical Sciences
SOI for a 1-Volt CMOS Technology and Application to a 512kb SRAM with 3.5 ns Access Time
- G. Shahidi
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- 1993
- IEDM 1993
Conference paperVertical Profile Optimization of Very High Frequency Epitaxial Si- and SiGe-Base Bipolar Transistors
- E.F. Crabbé
- B.S. Meyerson
- et al.
- 1993
- IEDM 1993
Conference paperOptimization of SiGe HBT Technology for High Speed Analog and Mixed-Signal Applications
- D.L. Harame
- J.M.C. Stork
- et al.
- 1993
- IEDM 1993
Conference paperDefects in amorphous hydrogenated silicon nitride films
- Jerzy Kanicki
- W.L. Warren
- 1993
- Journal of Non-Crystalline Solids
PaperSorption of methylene chloride vapor in polyimide films
- Christopher R. Moylan
- Christopher P. Wade
- et al.
- 1993
- High Performance Polymers
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- T.A. Rabedeau
- M. Toney
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- 1993
- Physical Review B
PaperPhoton emission from adsorbed C60 molecules with sub-nanometer lateral resolution
- R. Berndt
- R. Gaisch
- et al.
- 1993
- Applied Physics A Solids and Surfaces
PaperPrecipitation of arsenic in doped GaAs
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- K. Mahalingam
- et al.
- 1993
- Journal of Electronic Materials
PaperHyperpolarizabilities of tolanes and pyridyl analogues
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- Cecilia A. Walsh
- 1993
- Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics
Paper