Silylation of resist materials using di- and polyfunctional organosilicon compounds
- E. Babich
- J. Paraszczak
- et al.
- 1990
- Microelectronic Engineering
Paper
Publications
14466 results for Physical Sciences
Range of high energy phosphorus and medium energy boron ions implanted in polymers
- D. Tsoukalas
- 1990
- Solid State Electronics
PaperComputer simulation studies of anisotropic systems. XIX. Mesophases formed by the gay-berne model mesogen
- G.R. Luckhurt
- R.A. Stephens
- et al.
- 1990
- Liquid Crystals
PaperSoft X-ray Microscopy in Biology and Medicine: Status and Prospects
- Stephen Rothman
- Erik Anderson
- et al.
- 1990
- Physica Scripta
PaperMolecular-beam study of gas-surface chemistry in the ion assisted etching of silicon with atomic and molecular hydrogen and chlorine
- J.W. Coburn
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperCalculation of unimolecular rate constants for common metalorganic vapor phase epitaxy precursors via RRKM theory
- N.I. Buchan
- J.M. Jasinski
- 1990
- Journal of Crystal Growth
PaperQuantum Monte Carlo simulations for high-Tc models
- I. Morgenstern
- W. Von Der Linden
- et al.
- 1990
- Physica B: Physics of Condensed Matter
PaperLiquid-crystalline behaviour of a series of poly(di-n-alkylsilanes)
- P. Weber
- D. Guillon
- et al.
- 1990
- Liquid Crystals
PaperInitial stage deposition of Ag on the Si (100)2x1 surface studied by scanning tunneling microscopy
- T. Hashizume
- R.J. Hamers
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSuper-roughening: A new phase transition on the surfaces of crystals with quenched bulk disorder
- John Toner
- D.P. Divincenzo
- 1990
- Physical Review B
Paper