Thermal stability of polycrystalline silicon/metal oxide interfaces
- A.C. Callegari
- E. Gousev
- et al.
- 2002
- Applied Physics Letters
Paper
Publications
45 results for M. Gribelyuk
Interfacial oxide formation and oxygen diffusion in rare earth oxide-silicon epitaxial heterostructures
- V. Narayanan
- S. Guha
- et al.
- 2002
- Applied Physics Letters
PaperA comparison of grain size measurements in Al-Cu thin films: Imaging verses diffraction techniques
- Lynne Gignac
- C.E. Murray
- et al.
- 2002
- Microscopy and Microanalysis
PaperInterface reactions in ZrO 2 based gate dielectric stacks
- M. Gribelyuk
- A.C. Callegari
- et al.
- 2002
- Journal of Applied Physics
PaperMapping of Electrostatic Potential in Deep Submicron CMOS Devices by Electron Holography
- M. Gribelyuk
- M.R. McCartney
- et al.
- 2002
- Physical Review Letters
PaperPhysical and electrical characterization of Hafnium oxide and Hafnium silicate sputtered films
- A.C. Callegari
- E. Cartier
- et al.
- 2001
- Journal of Applied Physics
PaperUltrathin high-K metal oxides on silicon: Processing, characterization and integration issues
- E. Gusev
- E. Cartier
- et al.
- 2001
- Microelectronic Engineering
Conference paperGroup IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitrates
- Tiezhong Ma
- Stephen A. Campbell
- et al.
- 2001
- IEEE Transactions on Electron Devices
PaperElectromigration in AlCu lines: Comparison of Dual Damascene and metal reactive ion etching
- R. Filippi
- M. Gribelyuk
- et al.
- 2001
- Thin Solid Films
PaperUltrathin high-K gate stacks for advanced CMOS devices
- E. Gusev
- D.A. Buchanan
- et al.
- 2001
- Technical Digest - International Electron Devices Meeting
Paper